Design, Fabrication and Measurement of Concave Micro Grating Spectrometer Chip Fabricated by X-ray Lithographic Technology
نویسندگان
چکیده
1 Graduate School of Electro-Optical Engineering, Yuan Ze University, Chung-Li, Tao-Yuan 320, Taiwan, R.O.C. 2 National Synchrotron Radiation Research Center, Hsinchu, Taiwan, R.O.C. 3 Department of Electro-Optical Engineering, Vanung University, Chung-Li , Tao-Yuan 32045, Taiwan, R.O.C. a [email protected]; b [email protected]; c [email protected]; d [email protected]; e [email protected]; f [email protected]; g [email protected]; h [email protected];
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